エキシマレーザー照射による銅窒化ホウ素混合薄膜の摩擦特性改善

• 後藤 真宏

  Nanomaterials Laboratory, National Institute for Materials Science

• 笠原 章

  Nanomaterials Laboratory, National Institute for Materials Science

• 土佐 正弘

  Nanomaterials Laboratory, National Institute for Materials Science

• 吉原 一紘

  Nanomaterials Laboratory, National Institute for Materials Science

書誌事項

タイトル別名

• Improvement of Frictional Property of Copper-Boron Nitride Complex by Excimer Laser Irradiation.
• ソクホウ エキシマレーザー ショウシャ ニ ヨル ドウ チッカ ホウソ コンゴウ ハクマク ノ マサツ トクセイ カイゼン

抄録

Low frictional coating films made of copper and boron nitride complex on a stainless steel substrate were successfully synthesized by magnetron co-sputter deposition with excimer laser irradiation. Frictional property of the films was observed by a vacuum friction measuring apparatus. The film properties were also obtained by a scanning auger electron spectroscopy, a Vikers hardness measuring apparatus and a contact angle measuring appatatus. Surface energy and film hardness were also modified by the laser irradiation. Friction coefficients as low as 0.075 under ultra-high vacuum conditions were achieved after irradiating the films.

収録刊行物

• 真空

  真空 45 (12), 858-861, 2002

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679041953280
• NII論文ID: 10010088895
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.45.858
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 6412490
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6412490
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可