エキシマレーザー照射による銅窒化ホウ素混合薄膜の摩擦特性改善 Improvement of Frictional Property of Copper-Boron Nitride Complex by Excimer Laser Irradiation
Low frictional coating films made of copper and boron nitride complex on a stainless steel substrate were successfully synthesized by magnetron co-sputter deposition with excimer laser irradiation. Frictional property of the films was observed by a vacuum friction measuring apparatus. The film properties were also obtained by a scanning auger electron spectroscopy, a Vikers hardness measuring apparatus and a contact angle measuring appatatus. Surface energy and film hardness were also modified by the laser irradiation. Friction coefficients as low as 0.075 under ultra-high vacuum conditions were achieved after irradiating the films.
真空 45(12), 858-861, 2002-12-20
The Vacuum Society of Japan