エキシマレーザー照射による銅窒化ホウ素混合薄膜の摩擦特性改善 Improvement of Frictional Property of Copper-Boron Nitride Complex by Excimer Laser Irradiation

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著者

    • 後藤 真宏 GOTO Masahiro
    • Nanomaterials Laboratory, National Institute for Materials Science Nanomaterials Laboratory, National Institute for Materials Science
    • 笠原 章 KASAHARA Akira
    • Nanomaterials Laboratory, National Institute for Materials Science Nanomaterials Laboratory, National Institute for Materials Science

抄録

Low frictional coating films made of copper and boron nitride complex on a stainless steel substrate were successfully synthesized by magnetron co-sputter deposition with excimer laser irradiation. Frictional property of the films was observed by a vacuum friction measuring apparatus. The film properties were also obtained by a scanning auger electron spectroscopy, a Vikers hardness measuring apparatus and a contact angle measuring appatatus. Surface energy and film hardness were also modified by the laser irradiation. Friction coefficients as low as 0.075 under ultra-high vacuum conditions were achieved after irradiating the films.

収録刊行物

  • 真空

    真空 45(12), 858-861, 2002-12-20

    The Vacuum Society of Japan

参考文献:  4件中 1-4件 を表示

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    後藤真宏

    真空 44, 13, 2001

    被引用文献1件

  • <no title>

    GOTO M.

    Appl. Surf. Sci. 185, 172, 2002

    被引用文献1件

  • <no title>

    GOTO M.

    Thin Solid Films 405, 300, 2002

    被引用文献3件

  • <no title>

    笠原章

    真空 43, 986, 2000

    被引用文献3件

各種コード

  • NII論文ID(NAID)
    10010088895
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6412490
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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