Rapid Synthesis of Yttria-Stabilized Zirconia Films by Laser Chemical Vapor Deposition

• Kimura Teiichi

  Institute for Materials Research, Tohoku University

• Goto Takashi

  Institute for Materials Research, Tohoku University

抄録

Yttria stabilized zirconia (YSZ) films were synthesized at a high deposition rate of 180 nm/s (660 μm/h) by laser chemical vapor deposition (laser CVD) using Zr(dpm)₄ and Y(dpm)₃ precursors. Morphology of YSZ films changed from columnar to cone structure with increasing deposition rate. YSZ films with the columnar structure showed significant (200) orientation.

収録刊行物

• MATERIALS TRANSACTIONS

  MATERIALS TRANSACTIONS 44 (3), 421-424, 2003

  公益社団法人 日本金属学会

キーワード

• yttria stabilized zirconia
• laser chemical vapor deposition
• high deposition rate
• thermal barrier coatings

詳細情報

• CRID: 1390282679224458880
• NII論文ID: 10011910262
• NII書誌ID: AA1151294X
• DOI: 10.2320/matertrans.44.421
• COI: 1:CAS:528:DC%2BD3sXjslGltb4%3D
• ISSN: 13475320
• ISSN: 13459678
• ISSN: http://id.crossref.org/issn/09161821
• HANDLE: 10097/52346
• NDL書誌ID: 6493312
• Web Site: https://tohoku.repo.nii.ac.jp/records/44274
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6493312
• Web Site: https://www.jstage.jst.go.jp/article/matertrans/44/3/44_3_421/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • IRDB
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可