First observation of SiO_2/Si(100) interfaces by spherical aberration-corrected high-resolution transmission electron microscopy

• TANAKA Nobuo

  Department of Crystalline Materials Science and C. I. R. S. E. of Nagoya University

• YAMASAKI Jun

  Department of Crystalline Materials Science and C. I. R. S. E. of Nagoya University

• USUDA Koji

  LSI Basic Technology, Laboratory, Toshiba Co.

• IKARASHI Nobuyuki

  Silicon Systems Research Laboratory, NEC Co.

収録刊行物

• Journal of electron microscopy

  Journal of electron microscopy 52 (1), 69-73, 2003-02-01

キーワード

• SiO_2
• Si interfaces
• spherical-aberration correction
• HRTEM
• detection of oxygen atomic columns

詳細情報

• CRID: 1572261550033884800
• NII論文ID: 10012104634
• NII書誌ID: AA00697060
• ISSN: 00220744
• 本文言語コード: en
• データソース種別:
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