Electron-Irradiation-Induced Amorphization in Mo/Si Nano-Multilayer Material
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- Shioya Etsuko
- Materials Science Division, Graduate School of Engineering, Hokkaido University
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- Suda Takanori
- Materials Science Division, Graduate School of Engineering, Hokkaido University
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- Watanabe Seiichi
- Materials Science Division, Graduate School of Engineering, Hokkaido University
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- Ohnuki Somei
- Materials Science Division, Graduate School of Engineering, Hokkaido University
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- Ishino Masahiko
- Kansai Research Establishment, Japan Atomic Energy Research Institute
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- Yoda Osamu
- Kansai Research Establishment, Japan Atomic Energy Research Institute
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- Abe Hiroaki
- Takasaki Research Establishment, Japan Atomic Energy Research Institute
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- Phillip Fritz
- Max-Planck-Institut fur Metallforschung
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抄録
In the Mo–Si system, there are three typical intermetallic compounds. In order to get insight into the phase stability under irradiation, interface structure and non-equilibrium phase formation in multilayer materials with several nanometers scale were investigated by means of high-voltage electron microscope. The initial structure was composed of crystalline Mo and amorphous Si layers, and transition layer existed at the interfaces. The thickness of transition layers is thicker at the Mo-on-Si than at the Si-on-Mo interface. While those structures were basically stable after thermal annealing up to 773 K, two types of amorphous layers developed during electron irradiation at room temperature: one is an amorphous-Si layer and the other is a Mo–Si mixing layer. And the radiation-induced amorphization was accompanied by anomalous shrinkage in the thickness of layers. It is suggested that those phenomena are related to non-equilibrium phase formation and biased diffusion process during irradiation.
収録刊行物
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 43 (4), 650-653, 2002
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390282679222324224
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- NII論文ID
- 10012322248
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- NII書誌ID
- AA1151294X
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- COI
- 1:CAS:528:DC%2BD38XksF2rsbw%3D
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- ISSN
- 13475320
- 13459678
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- NDL書誌ID
- 6262925
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可