Characteristics of Thin-Film NTC Infrared Sensors

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抄録

Characteristics of thin-film NTC infrared sensors fabricated by micromachining technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/SiO<I><SUB>x</SUB></I>/(100)Si. NTC film of Mn<SUB>1.5</SUB>CoNi<SUB>0.5</SUB>O<SUB>4</SUB> with 0.5 \\micron in thickness was deposited on SiO<I><SUB>x</SUB></I> layer (1.2 \\micron) by PLD (pulsed laser deposition) and annealed at 600–800°C in air for 1 h. Au (200 nm)/Ti (100 nm) electrode was coated on NTC film by dc sputtering. By the results of microstructure, X-ray and NTC analysis, post-annealed NTC films at 700°C for 1 h showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20–65 \\micron. Sensors with thin sensing membrane showed the good detecting characteristics.

収録刊行物

  • Materials transactions

    Materials transactions 43(5), 1065-1068, 2002-05-01

    公益社団法人 日本金属学会

参考文献:  9件中 1-9件 を表示

  • <no title>

    LEE M.

    Opt. Eng. 39, 2000

    被引用文献1件

  • <no title>

    PUTLEY E. H.

    Ferroelectrics 33, 207-216, 1981

    被引用文献2件

  • <no title>

    BALIGA S.

    Appl. Phys. 50, 473-477, 1990

    被引用文献1件

  • <no title>

    JEROMINEK H.

    SPIE 2746, 60-64, 1996

    被引用文献1件

  • <no title>

    WHATMORE R. W.

    Rep. Prog. Phys. 49, 1335-1386, 1986

    DOI 被引用文献1件

  • <no title>

    KLEINSCHMIDT P.

    Sensors and Actuators A 33, 5-17, 1992

    DOI 被引用文献1件

  • <no title>

    LAI P. T.

    IEEE Elec. Dev. Lett. 20, 589-591, 1999

    DOI 被引用文献1件

  • <no title>

    YOKOYAMA T.

    J. Mater. Sci. 30, 1845-1848, 1995

    DOI 被引用文献1件

  • <no title>

    DZIEDZIC A.

    Meas. Sci. Technol. 8, 78-85, 1996

    被引用文献1件

各種コード

  • NII論文ID(NAID)
    10012323416
  • NII書誌ID(NCID)
    AA1151294X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13459678
  • NDL 記事登録ID
    6180167
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z53-J286
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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