Titanium Coating of Scaffold Carbon Foam by ECR Sputtering

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Titanium films, of 5 \\micron in thickness were deposited uniformly on three-dimensional structures of scaffold carbon foam substrates using a hybrid electron cyclotron resonance-direct current (ECR-DC) sputtering system. A cylindrical hollow cathode with internal diameter of 80 mm and external diameter of 90 mm and length of 60 mm, negatively biased, was used as titanium atoms supplier. The DC sputtering voltage applied to the target controlled the feeding with excited titanium atoms. The Vickers micro-hardness of the films was found to be in the range of 250–300 HV. The film surfaces were smooth and showing pure titanium, preferentially grown on the Ti (100) crystallographic phase. Flexural strength and elastic modulus of the carbon foam were improved by a factor of 1.5 and 2.6 respectively.

収録刊行物

  • Materials transactions

    Materials transactions 43(12), 3025-3027, 2002-12-01

    公益社団法人 日本金属学会

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各種コード

  • NII論文ID(NAID)
    10012328921
  • NII書誌ID(NCID)
    AA1151294X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13459678
  • NDL 記事登録ID
    6395092
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z53-J286
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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