A single precursor photolitic chemical vapor deposition of silica film using a dielectric barrier discharge xenon excimer lamp

• YOKOTANI A.

収録刊行物

• Appl. Phys. Lett.

  Appl. Phys. Lett. 69 1399-1401, 1996

詳細情報

• CRID: 1574231874881484544
• NII論文ID: 10012333140
• データソース種別:
  • CiNii Articles