Masked deposition techniques for achieving multilayer period variations required for short-wavelength (68-A) soft-x-ray imaging optics

• KORTRIGHT J. B.

収録刊行物

• Appl. Opt.

  Appl. Opt. 32 6961-6968, 1993

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• CRID: 1574231874881562624
• NII論文ID: 10012334352
• データソース種別:
  • CiNii Articles