熱フィラメントCVD法による鉄基板上へのダイヤモンドの合成 Synthesis of Diamond on Iron Substrate by Hot-Filament CVD
Diamond synthesis onto iron substrate was tried by hot-filament chemical vapor deposition (HFCVD). Diamond can be synthesized at an atmospheric pressure by spraying a source gas onto an iron substrate with a nozzle. Diamond crystal grows to a size of about 20μm in 180 min. Diamond synthesized by the present method contains only a small amount of non-diamond carbon. Diamond synthesis on a silicon wafer is also enhanced by spraying a source gas onto a substrate like an iron case.
- 表面技術 = The journal of the Surface Finishing Society of Japan
表面技術 = The journal of the Surface Finishing Society of Japan 54(10), 689-692, 2003-10-01
The Surface Finishing Society of Japan