Composition of Positive Ions in High-Density H2 Plasmas Measured by Time-of-Flight Mass Spectrometry

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The composition of positive ions, H+, H$_{2}^{+}$, and H$_{3}^{+}$, in high-density H2 plasmas was measured using a time-of-flight mass spectrometer which was attached behind the end plate of a linear helicon-wave plasma source. The dominant ion was H$_{3}^{+}$ when electron density was below $3.5\times 10^{11}$ cm-3, while in high-density plasmas with $n_{\text{e}}\geq 8\times 10^{11}$ cm-3, H+ and H$_{2}^{+}$ were dominant at similar fractional abundances. In the afterglow plasma, the fractional abundance of H$_{2}^{+}$ decreased rapidly with a time constant of ${\sim}3$ μs. Simultaneously with the disappearance of H$_{2}^{+}$, H$_{3}^{+}$ became dominant in the late afterglow. The above experimental results were examined by a rate equation analysis based on available reaction rate coefficients. The results of the rate equation analysis were qualitatively consistent with the experimental observations.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 42(11), 7080-7085, 2003-11-15

    公益社団法人 応用物理学会

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各種コード

  • NII論文ID(NAID)
    10012564759
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    6753092
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  NDL  J-STAGE  JSAP 
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