Characterization of piezoelectric property of PZT thin film deposited on Si by ECR sputtering

• TOYAMA M.

収録刊行物

• Sensors and Actuators A

  Sensors and Actuators A 45 125-, 1994

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• CRID: 1574231874834226816
• NII論文ID: 10012704006
• データソース種別:
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