Machining of three dimensional microstryctures in silicon by electro discharge machining
Journal
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- Sensors and Actuators, A
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Sensors and Actuators, A 67 159-165, 1998
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Details 詳細情報について
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- CRID
- 1571698600043828352
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- NII Article ID
- 10012704018
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- Data Source
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- CiNii Articles