PZT圧電体膜を用いた異常音検知マイクロセンサの作製とその評価

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  • Fabrication and Characterization of Micro Sensors for Detecting Specific Sonic Wave Using PZT Film on Si Diaphragm and Cantilever
  • PZT アツデンタイ マク オ モチイタ イジョウオン ケンチ マイクロセンサ ノ サクセイ ト ソノ ヒョウカ

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Micro sonic sensors using piezoelectric diaphragm and cantilever have been developed in order to detect a weak specific sonic wave that is emitted from rotary machinery with anomalous behavior under a large background noise. A piezoelectric PbZr0.52Ti0.48O3 film was prepared on a micromachined SOI wafer by sol-gel method. The sonic wave response for the both diaphragm- and cantilever-sensors was investigated. The both sensors showed resonant peaks which are proportional to the reciprocal of the diaphragm-area and to the power of -2 of the cantilever-length in the frequency region over 5 kHz. The sensitivity and Q-value were estimated to be on the order of 10 mV/Pa and 100, respectively. It is also shown that a specific sonic wave can be detected by choosing several sensors with different diaphragm-area or cantilever-length.

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