Fabrication and Characterization of Micro Sensors for Detecting Specific Sonic Wave Using PZT Film on Si Diaphragm and Cantilever
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- Murakami Shuichi
- Materials Technology Division, Technology Research Institute of Osaka Prefecture
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- Inoue Koji
- Materials Technology Division, Technology Research Institute of Osaka Prefecture
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- Suzuki Yoshihiko
- Materials Technology Division, Technology Research Institute of Osaka Prefecture
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- Takamatsu Shigeo
- Technical Research Institute, Technology Headquarters, Hitachi Zosen Corporation
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- Yamashita Kaoru
- Graduate School of Engineering Science, Osaka University
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- Okuyama Masanori
- Graduate School of Engineering Science, Osaka University
Bibliographic Information
- Other Title
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- PZT圧電体膜を用いた異常音検知マイクロセンサの作製とその評価
- PZT アツデンタイ マク オ モチイタ イジョウオン ケンチ マイクロセンサ ノ サクセイ ト ソノ ヒョウカ
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Abstract
Micro sonic sensors using piezoelectric diaphragm and cantilever have been developed in order to detect a weak specific sonic wave that is emitted from rotary machinery with anomalous behavior under a large background noise. A piezoelectric PbZr0.52Ti0.48O3 film was prepared on a micromachined SOI wafer by sol-gel method. The sonic wave response for the both diaphragm- and cantilever-sensors was investigated. The both sensors showed resonant peaks which are proportional to the reciprocal of the diaphragm-area and to the power of -2 of the cantilever-length in the frequency region over 5 kHz. The sensitivity and Q-value were estimated to be on the order of 10 mV/Pa and 100, respectively. It is also shown that a specific sonic wave can be detected by choosing several sensors with different diaphragm-area or cantilever-length.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 124 (4), 143-147, 2004
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390001204460041216
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- NII Article ID
- 10012704045
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 6909623
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed