Photocleavage Processes in an Iminosulfonate Derivative Usable as Photoacid in Resist Technology

  • LALEVEE Jacques
    Department de Photochimie Generale, UMR n°7525, Ecole Nationale Superieure de Chimie
  • ALLONAS Xavier
    Department de Photochimie Generale, UMR n°7525, Ecole Nationale Superieure de Chimie
  • FOUASSIER Jean-Pierre
    Department de Photochimie Generale, UMR n°7525, Ecole Nationale Superieure de Chimie
  • SHIRAI Masamitsu
    Department of Applied Chemistry, Osaka Prefecture University
  • TSUNOOKA Masahiro
    Department of Applied Chemistry, Osaka Prefecture University

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詳細情報 詳細情報について

  • CRID
    1573105974948641408
  • NII論文ID
    10012814101
  • NII書誌ID
    AA00603318
  • ISSN
    03667022
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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