デジタル制御四極子形質量分析計の開発 Development of the Digitally Controlled Quadrupole Power Supply System
The digitally controlled radio frequency (RF) output circuit for the quadrupole mass spectrometer is reported. The circuit does not include the nonlinear negative feedback circuit that reduces the accuracy for the control of RF output voltage. The mass spectra for residual gasses, Kr and Xe, those mass resolution at 10% peak height of less than 0.5 (M/z = 1 to 66) and less than 1 (M/z = 80 to 132), respectively, were obtained with this circuit. The separation of the peaks for <SUP>4</SUP>He and D<SUB>2</SUB>, that corresponding to the mass resolution less than 0.0256, were also observed by using the second stability zone of Mathew's equation.
- 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN
真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 104-107, 2004-03-20
The Vacuum Society of Japan