超高真空仕様表面波励起高密度プラズマ発生装置の評価 UHV-Compatible Apparatus for the High-Density Plasma Induced by Surface Wave Modes

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A microwave launcher with a ring slot has been designed, allowing a UHV viewing port to be utilized as a dielectric material in order to induce high-density plasma with the surface wave mode in a UHV compatible chamber. Electrostatic probe measurements on the plasma show that the plasma density distribution results from an intensive ionization rate in the vicinity of the dielectric/plasma interface and from the ambipolar diffusion. When nitrogen is mixed to argon gas, the plasma density remains almost constant as a result of the descrete surface mode, whereas the atomic nitrogen density varies in proportion to the nitrogen partial pressure.

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 281-284, 2004-03-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10012867329
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    6930222
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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