超高真空仕様表面波励起高密度プラズマ発生装置の評価

• 伴野 達也

  東京大学大学院工学系研究科物理工学専攻

書誌事項

タイトル別名

• UHV-Compatible Apparatus for the High-Density Plasma Induced by Surface Wave Modes
• チョウコウシンクウ シヨウ ヒョウメンハレイキコウミツド プラズマ ハッセイ ソウチ ノ ヒョウカ

抄録

A microwave launcher with a ring slot has been designed, allowing a UHV viewing port to be utilized as a dielectric material in order to induce high-density plasma with the surface wave mode in a UHV compatible chamber. Electrostatic probe measurements on the plasma show that the plasma density distribution results from an intensive ionization rate in the vicinity of the dielectric/plasma interface and from the ambipolar diffusion. When nitrogen is mixed to argon gas, the plasma density remains almost constant as a result of the descrete surface mode, whereas the atomic nitrogen density varies in proportion to the nitrogen partial pressure.

収録刊行物

• 真空

  真空 47 (3), 281-284, 2004

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390001204063290112
• NII論文ID: 10012867329
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.47.281
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 6930222
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6930222
• 本文言語コード: ja
• データソース種別:
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