超高真空仕様表面波励起高密度プラズマ発生装置の評価 UHV-Compatible Apparatus for the High-Density Plasma Induced by Surface Wave Modes
A microwave launcher with a ring slot has been designed, allowing a UHV viewing port to be utilized as a dielectric material in order to induce high-density plasma with the surface wave mode in a UHV compatible chamber. Electrostatic probe measurements on the plasma show that the plasma density distribution results from an intensive ionization rate in the vicinity of the dielectric/plasma interface and from the ambipolar diffusion. When nitrogen is mixed to argon gas, the plasma density remains almost constant as a result of the descrete surface mode, whereas the atomic nitrogen density varies in proportion to the nitrogen partial pressure.
- 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN
真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 47(3), 281-284, 2004-03-20
The Vacuum Society of Japan