高濃度オゾンガスの局所リアルタイム濃度測定法の開発

書誌事項

タイトル別名
  • Development of Local and Real-time Concentration Measuring Method for Ozone Gas
  • コウノウド オゾンガス ノ キョクショ リアルタイム ノウド ソクテイホウ ノ カイハツ

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抄録

A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.

収録刊行物

  • 真空

    真空 48 (6), 378-381, 2005

    一般社団法人 日本真空学会

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