Nd: YAGレーザー第4高調波によるシリコンの流水中での加工特性

• 黒田 孝春

  木更津工業高等専門学校機械工学科

• 渡部 武弘

  千葉大学工学部電子機械工学科

• 松坂 壮太

  千葉大学工学部電子機械工学科

書誌事項

タイトル別名

• Micromachining Characteristics of Silicon in Flowing Water Using Fourth-Harmonic Pulsed Nd: YAG Laser Beams
• Nd YAG レーザー ダイ4 コウチョウハ ニ ヨル シリコン ノ リュウスイ チュウ デ ノ カコウ トクセイ

抄録

Micromachining of silicon was investigated using the fourth-harmonic wavelength (λ=266 nm,τ=6ns) of a pulsed Nd: YAG laser beam. The beam was irradiated onto a silicon workpiece under flowing water. The drilled surfaces were then characterized using an optical microscope, laser interference microscope and a scanning electron microscope. Compared with atmospheric machining, problems, such as debris and reattachment of molten material, were improved clearly and dramatically. Machining under water produced a somewhat smoother ablated surface because the molten silicon was rapidly solidified. When the focal point was set over the surface, the ablated shapes after laser irradiation were irregular because water evaporation caused unstable ablation. On the other hand, stable ablation was produced when the focal point was set under the surface. The relationship between the irradiation parameters and the resulting shape became quantitatively clear from the experiment.

収録刊行物

• レーザー研究

  レーザー研究 33 (7), 469-474, 2005

  一般社団法人 レーザー学会

キーワード

• Silicon
• Micromachining
• Fourth-harmonic pulsed Nd: YAG laser beams
• Flowing water
• Characteristics of ablated shape

詳細情報

• CRID: 1390001204647970304
• NII論文ID: 10016561304
• NII書誌ID: AN00255326
• DOI: 10.2184/lsj.33.469
• ISSN: 13496603
• ISSN: 03870200
• NDL書誌ID: 7424415
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7424415
• Web Site: https://www.jstage.jst.go.jp/article/lsj/33/7/33_469/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可