チタン合金の超塑性鍛造によるマイクロ金型の製造

• 吉村 英徳

  香川大学工学部

• 方山 智之

  香川大学大学院工学研究科

• 大平 文和

  香川大学工学部

• 橋口 原

  香川大学工学部

• 池田 大輔

  アオイ電子(株)

• 三原 豊

  香川大学工学部

書誌事項

タイトル別名

• Production of Microdies by Superplastic Forging of Ti alloy
• チタン ゴウキン ノ チョウソセイ タンゾウ ニ ヨル マイクロ カナガタ ノ セイゾウ

抄録

We developed a fabrication technique for microdies made of titanium superplastic alloy. This technique consists of the following three processes: (1) microshapes are formed on Si substrates by a micromachining technique, (2) a functionally gradient layer of TiN/Ti is deposited on the Si base structures by sputtering, and (3) the Si base structures are imprinted with a Ti alloy using a vacuum hot press machine. In the third process, the functionally gradient layer is diffusion bonded to the Ti alloy simultaneously. In this technique, superplastic working of Ti alloy (SP700) is carried out to realize high precision forging at the microlevel. In addition, the functionally gradient layer of TiN/Ti is bonded over the Ti alloy to attain a surface roughness at the nanolevel. In this study, to satisfy these requirements of the Micro Electro-Mechanical Systems device, the working conditions such as working temperature, strain rate, final reduction in height of the Ti alloy specimen and thickness of the sputtered layer of TiN/Ti were optimised.

収録刊行物

• 塑性と加工

  塑性と加工 47 (540), 54-58, 2006

  一般社団法人 日本塑性加工学会

キーワード

• forging
• titanium alloy
• Si base structure
• functionally gradient layer
• superplastic forming
• microdie
• diffusion bonding

詳細情報

• CRID: 1390282681475680128
• NII論文ID: 10016731559
• NII書誌ID: AN00135062
• DOI: 10.9773/sosei.47.54
• COI: 1:CAS:528:DC%2BD28XhsFOns74%3D
• ISSN: 18820166
• ISSN: 00381586
• ISSN: http://id.crossref.org/issn/00381586
• NDL書誌ID: 7813238
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7813238
• Web Site: https://www.jstage.jst.go.jp/article/sosei/47/540/47_540_54/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可