# Determination of Plasma Flow Velocity by Mach Probe and Triple Probe with Correction by Laser-Induced Fluorescence in Unmagnetized Plasmas

## 抄録

Plasma flow velocity was measured by Mach probe (MP) and laser-induced fluorescence (LIF) methods in unmagnetized plasmas with supersonic ion beams. Since the ion gyro-radius was much larger than the probe radius, unmagnetized Mach probe theory was used to determine plasma flow in argon RF plasma with a weak magnetic field (${<}200$ G). In order to determine flow velocities, the Mach probe is calibrated via LIF in the absence of the ion beam, where existing probe theories may be valid although they use different geometries (sphere and plane) and analyzing tools [particle-in-cell (PIC) and kinetic models]. For the comparison of the average plasma flow velocities by MP and LIF, the supersonic ion beam velocity was measured by LIF and then incorporated into a simple formula for average plasma velocity with provisions for background plasma density and beam-corrected electron temperature ($T_{\text{e}}$) measured by a triple probe.

## 収録刊行物

• Japanese journal of applied physics. Pt. 1, Regular papers & short notes

Japanese journal of applied physics. Pt. 1, Regular papers & short notes 45(7), 5945-5950, 2006-07-15

Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

## 各種コード

• NII論文ID(NAID)
10018000396
• NII書誌ID(NCID)
AA10457675
• 本文言語コード
EN
• 資料種別
ART
• 雑誌種別
大学紀要
• ISSN
0021-4922
• NDL 記事登録ID
7979339
• NDL 雑誌分類
ZM35(科学技術--物理学)
• NDL 請求記号
Z53-A375
• データ提供元
CJP書誌  NDL  JSAP

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