Density Control of Carbon Nanotubes through the Thickness of Fe/Al Multilayer Catalyst

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著者

    • Furuta Mamoru
    • Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kochi 782-8502, Japan
    • Oura Kenjiro
    • Research Center for Ultrahigh Voltage Electron Microscopy, Osaka University, 7-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
    • Hirao Takashi
    • Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kochi 782-8502, Japan

抄録

The density control of vertically aligned carbon nanotubes (CNTs) has been studied using a thermal chemical vapor deposition (CVD) method in correlation with the thicknesses of the Fe/Al multilayer catalyst on a Si substrate. The density of CNTs could be controlled through the thicknesses of both the Al layer and Fe catalyst layer. The low density of the Fe catalyst grains formed by thermal treatment, caused the formation of CNTs with random orientations, and resulted in a decrease in the CNT height. The optimum film thickness of the Fe/Al multilayer catalyst for obtaining long CNTs (220 μm) was determined for the case of a substrate temperature of 700 °C.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes  

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 45(7), 6043-6045, 2006-07-15 

    Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

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各種コード

  • NII論文ID(NAID)
    10018000707
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    7979756
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  CJP引用  NDL  JSAP 
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