High-resolution transmission electron microscopy and electron energy-loss spectroscopy study of polycrystalline-Si/ZrO_2/SiO_2/Si metal-oxide-semiconductor structures
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- YANG Jun-Mo
- National Nanofab Center
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- KIM Joong Jung
- Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
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- KIM Kyung-Seob
- Department of Electronic Engineering, Yeojoo Institute of Technology
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- LEE Wan-Gyu
- National Nanofab Center
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- KAWASAKI Masahiro
- JEOL Ltd
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Journal
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- Journal of electron microscopy
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Journal of electron microscopy 55 (1), 1-5, 2006-01-01
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Keywords
Details 詳細情報について
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- CRID
- 1574231875082900736
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- NII Article ID
- 10018006114
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- NII Book ID
- AA00697060
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- ISSN
- 00220744
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- Text Lang
- en
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- Data Source
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- CiNii Articles