Auクラスター一次イオン源を用いたTOF-SIMS測定における二次イオン強度増大効果 Enhancement of Secondary Ion Intensities from Polymers in the TOF-SIMS Analysis using Gold Cluster Ions
Enhancement of the secondary ion intensity in the TOF-SIMS spectra obtained by Au<Sup>+</Sup> and Au<Sub>3</Sub><Sup>+</Sup> bombardment was investigated in comparison with Ga<Sup>+</Sup> excitation using polymer samples with different molecular weight distributions. Since the polymer samples used in this experiment have wide molecular weight distributions, the advantages of a gold cluster primary ion source over a monoatomic ion source could systematically be evaluated. It was found that a Au primary ion source for a TOF-SIMS instrument has advantages in such terms as (1) the mass effect of the monoatomic primary ion, i.e., Au<Sup>+</Sup> vs. Ga<Sup>+</Sup>, (2) the cluster primary ion effect of Au<Sub>3</Sub><Sup>+</Sup> compared with Au<Sup>+</Sup> and Ga<Sup>+</Sup>, and (3)decrease in the degree of fragmentation by usage of a cluster primary ion beam compared with a monoatomic ion beam.
- 表面科学 = Journal of The Surface Science Society of Japan
表面科学 = Journal of The Surface Science Society of Japan 27(9), 518-522, 2006-09-10
The Surface Science Society of Japan