ドライポンプの排気特性の理論的予測 : スクロールポンプとスクリューポンプを例として Theoretical Prediction of the Pumping Performance of Dry Pumps : Taking the Scroll Pump and the Screw Pump by Way of Example

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抄録

  Since almost all commercially provided dry pumps are of the positive displacement type, the leak flow through clearance between displacement chambers in the pump is a dominant factor which determines pumping performance. Prediction methods for the pumping performance of dry pumps are explained by comparing it to the scroll pump and the screw pump. The scroll pump has long clearances, but the screw pump has relatively short ones, and the volume of the chambers reduces from the inlet toward the outlet in the scroll pump, but that in the screw pump is kept constant throughout the pumping process. Such a structural difference produces a small difference in the way of treating leak flow. These two methods can be applied to the other dry pumps requiring only minor modification.<br>

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN  

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 49(8), 460-465, 2006-08-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018052082
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    05598516
  • NDL 記事登録ID
    8091194
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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