Turbomolecular Pump

• ODAKA Kenji

  Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology

Bibliographic Information

Other Title

• ターボ分子ポンプ
• ターボ ブンシ ポンプ

Abstract

  Turbomolecular pumps (TMPs) are fully grown products. There are four points to say so. First, hydrodynamic designing method is well established because there is no change in the pumping speed in the last ten years. Second, ultimate pressures of the order of 10⁻¹⁰ Pa are achieved. This corresponds to the lowest outgassing rate developed for metals. Third, they have extended operating range to pressures as high as 100 Pa with combination of turbo-drag pumps. Fourth, TMPs with electro-magnetic bearings produce perfectly clean vacuum with clean roughing pumps. For further development TMPs might focus on special usages.<br>

Journal

• Shinku

  Shinku 49 (8), 466-469, 2006

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204064219008
• NII Article ID: 10018052093
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.49.466
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 8091199
• Web Site: http://id.ndl.go.jp/bib/8091199
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8091199
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed