Simulation of Flow in the Turbo Molecular Pump

• MATSUI Jun

  Faculty of Engineering, Yokohama National University

Bibliographic Information

Other Title

• ターボ分子ポンプ内流れのシミュレーション
• ターボ ブンシ ポンプ ナイ ナガレ ノ シミュレーション

Journal

• Shinku

  Shinku 49 (8), 476-480, 2006

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204064213504
• NII Article ID: 10018052120
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.49.476
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 8091239
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8091239
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles