書誌事項
- タイトル別名
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- Development of Deep Ultraviolet micro-Raman Spectroscopy-Characterization of nanosurface of semiconductors-
- キョク シガイケンビラマン ブンコウホウ ノ カイハツ ハンドウタイ ナノ ヒョウメンソウ ノ ヒョウカ
- Characterization of nanosurface of semiconductors
- 半導体ナノ表面層の評価
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Recent advance in instrumentations has provided progress in deep ultraviolet (DUV) Raman spectroscopy. This technique has enabled to characterize thin surface layers of wide gap semiconductors, because the penetra-tion depth of the DUV light is very shallow for these materials. We have briefly reviewed present status of the DUV Raman spectroscopy and its application to studies of inorganic and organic materials. Results of the DUV Raman characterization of surfaces and damage in nano-scaled surface layers which is induced by processing for device fabrication are also described.
収録刊行物
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- 分光研究
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分光研究 55 (5), 295-307, 2006
社団法人 日本分光学会
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詳細情報 詳細情報について
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- CRID
- 1390282681236741376
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- NII論文ID
- 10018105773
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- NII書誌ID
- AN00222531
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- ISSN
- 18846785
- 00387002
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- NDL書誌ID
- 8548203
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可