研削加工によるカーボン型を用いたガラス材料の大面積マイクロ成形 Large-Area Micro-Hot Embossing of Glass Materials with Glassy Carbon Mold Machined by Dicing

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Micro-nano-imprinting or hot embossing is a target of interest for the industrial production of micro- and nano-devices from the aspect of low cost. In fluidic micro electromechanical systems (MEMS) applications, polymer materials have been widely employed to fabricating economical products owing to their low cost. However, glasses are much more suitable for higher-temperature applications or under more adverse chemical environments. Moreover, the UV absorption of glass materials is much lower than that of polymers, which is an advantage for bioanalysis. In optical MEMS as well, glasses are good candidate materials with which to achieve good optical properties, such as a high refractive index and a low UV absorption. In our previous study, micro/nano imprinting was developed for glass using glassy carbon (GC) mold prepared by focused ion beam (FIB) machining. The disadvantages of FIB machining are the limited area of etching and long machining time. The typical area in FIB machining is less than 0.25 mm2. This is the reason we tried using GC mold fabricated using dicing machine. Micro-hot-embossed test structures were successfully demonstrated with a high fidelity. These fabricated microstructures can be applied to the fabrication of microchamber arrays used for PCR analysis.

収録刊行物

  • 塑性と加工 = JOURNAL OF THE JAPAN SOCIETY FOR TECHNOLOGY OF PLASTICITY  

    塑性と加工 = JOURNAL OF THE JAPAN SOCIETY FOR TECHNOLOGY OF PLASTICITY 47(549), 963-967, 2006-10-25 

    一般社団法人 日本塑性加工学会

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各種コード

  • NII論文ID(NAID)
    10018106281
  • NII書誌ID(NCID)
    AN00135062
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    00381586
  • NDL 記事登録ID
    8553432
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-218
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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