Large-Area Micro-Hot Embossing of Glass Materials with Glassy Carbon Mold Machined by Dicing

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  • 研削加工によるカーボン型を用いたガラス材料の大面積マイクロ成形
  • ケンサク カコウ ニ ヨル カーボンガタ オ モチイタ ガラス ザイリョウ ノ ダイ メンセキ マイクロ セイケイ

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Abstract

Micro-nano-imprinting or hot embossing is a target of interest for the industrial production of micro- and nano-devices from the aspect of low cost. In fluidic micro electromechanical systems (MEMS) applications, polymer materials have been widely employed to fabricating economical products owing to their low cost. However, glasses are much more suitable for higher-temperature applications or under more adverse chemical environments. Moreover, the UV absorption of glass materials is much lower than that of polymers, which is an advantage for bioanalysis. In optical MEMS as well, glasses are good candidate materials with which to achieve good optical properties, such as a high refractive index and a low UV absorption. In our previous study, micro/nano imprinting was developed for glass using glassy carbon (GC) mold prepared by focused ion beam (FIB) machining. The disadvantages of FIB machining are the limited area of etching and long machining time. The typical area in FIB machining is less than 0.25 mm2. This is the reason we tried using GC mold fabricated using dicing machine. Micro-hot-embossed test structures were successfully demonstrated with a high fidelity. These fabricated microstructures can be applied to the fabrication of microchamber arrays used for PCR analysis.

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