A Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor
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- Dau Van Thanh
- Ritsumeikan University
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- Dao Dzung Viet
- Ritsumeikan University
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- Hayashida Masahiro
- Ritsumeikan University
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- Dinh Thien Xuan
- Ritsumeikan University
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- Sugiyama Susumu
- Ritsumeikan University
Bibliographic Information
- Other Title
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- Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor
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Abstract
This paper presents the development of a dual axis convective microaccelerometer, whose working principle is based on the convective heat transfer and thermo-resistive effect of lightly-doped silicon. Different with developed convective accelerometer, the sensor utilizes a novel structure of the sensing element which can reduce 93% of thermal-induced stress. Moreover, the thermistors are made from low-doped p-type silicon, which has the TCR higher than that of metals and poly-silicon convective accelerometer. By using numerical method, the chip dimensions and the package size are optimized. The sensitivity of the sensor was simulated; other characteristics such as frequency response, shock resistance, noise problem are also deeply investigated. The sensor has been fabricated by MEMS process and characterized by experiments.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 126 (5), 190-194, 2006
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679438276736
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- NII Article ID
- 10018111800
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- NII Book ID
- AN1052634X
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- BIBCODE
- 2006IJTSM.126..190D
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 7946623
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed