A Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor

• Dau Van Thanh

  Ritsumeikan University

• Dao Dzung Viet

  Ritsumeikan University

• Hayashida Masahiro

  Ritsumeikan University

• Dinh Thien Xuan

  Ritsumeikan University

• Sugiyama Susumu

  Ritsumeikan University

書誌事項

タイトル別名

• Dual Axis Accelerometer Utilizing Low Doped Silicon Thermistor

抄録

This paper presents the development of a dual axis convective microaccelerometer, whose working principle is based on the convective heat transfer and thermo-resistive effect of lightly-doped silicon. Different with developed convective accelerometer, the sensor utilizes a novel structure of the sensing element which can reduce 93% of thermal-induced stress. Moreover, the thermistors are made from low-doped p-type silicon, which has the TCR higher than that of metals and poly-silicon convective accelerometer. By using numerical method, the chip dimensions and the package size are optimized. The sensitivity of the sensor was simulated; other characteristics such as frequency response, shock resistance, noise problem are also deeply investigated. The sensor has been fabricated by MEMS process and characterized by experiments.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 126 (5), 190-194, 2006

  一般社団法人 電気学会

キーワード

• Thermistor
• convective accelerometer
• dual axis
• low-doped p-type silicon
• thermal stress

詳細情報

• CRID: 1390282679438276736
• NII論文ID: 10018111800
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.126.190
• BIBCODE: 2006IJTSM.126..190D
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 7946623
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7946623
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/126/5/126_5_190/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可