キャピラリーを用いた安定な真空圧力場の作製 Generation of a Stable Vacuum Field by Using a Micro Capillary

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  It is necessary to generate a stable vacuum field for calibration of vacuum gauges by direct comparison with a reference gauge. According to ISO/TS 3536, it is required that the pressure indicated by the gauges shall be stable over time so that it dose not change more than 0.5% for time period of 2.5 min. In this study, three methods to generate a vacuum filed, namely, by using a variable leak valve, a mass flow controller and a combination in a capillary with a pressure controller, are evaluated from the viewpoint of both the stability and dynamic range of generated pressure.<br>   The vacuum field generated by a combination in a capillary with a pressure controller is the most stable of the three methods and satisfied the ISO/TS 3536 requirement over the range from 3.1×10<sup>-4</sup> to 4.8 Pa. This method is effective to generate a stable vacuum field for calibration of vacuum gauge.<br>

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN  

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 49(3), 129-131, 2006-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018133473
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    7930743
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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