Generation of a Stable Vacuum Field by Using a Micro Capillary

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  • YOSHIDA Hajime
    National Institute of Advanced Industrial Science and Technology
  • ARAI Kenta
    National Institute of Advanced Industrial Science and Technology
  • KOMATSU Sakae
    National Institute of Advanced Industrial Science and Technology
  • AKIMICHI Satoshi
    National Institute of Advanced Industrial Science and Technology
  • HIRATA Masahiro
    National Institute of Advanced Industrial Science and Technology

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Other Title
  • キャピラリーを用いた安定な真空圧力場の作製
  • キャピラリー オ モチイタ アンテイ ナ シンクウ アツリョクバ ノ サクセイ

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Abstract

  It is necessary to generate a stable vacuum field for calibration of vacuum gauges by direct comparison with a reference gauge. According to ISO/TS 3536, it is required that the pressure indicated by the gauges shall be stable over time so that it dose not change more than 0.5% for time period of 2.5 min. In this study, three methods to generate a vacuum filed, namely, by using a variable leak valve, a mass flow controller and a combination in a capillary with a pressure controller, are evaluated from the viewpoint of both the stability and dynamic range of generated pressure.<br>   The vacuum field generated by a combination in a capillary with a pressure controller is the most stable of the three methods and satisfied the ISO/TS 3536 requirement over the range from 3.1×10-4 to 4.8 Pa. This method is effective to generate a stable vacuum field for calibration of vacuum gauge.<br>

Journal

  • Shinku

    Shinku 49 (3), 129-131, 2006

    The Vacuum Society of Japan

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