キャピラリーを用いた安定な真空圧力場の作製

• 吉田 肇

  (独)産業技術総合研究所

• 新井 健太

  (独)産業技術総合研究所

• 小松 栄一

  (独)産業技術総合研究所

• 秋道 斉

  (独)産業技術総合研究所

• 平田 正紘

  (独)産業技術総合研究所

書誌事項

タイトル別名

• Generation of a Stable Vacuum Field by Using a Micro Capillary
• キャピラリー オ モチイタ アンテイ ナ シンクウ アツリョクバ ノ サクセイ

抄録

  It is necessary to generate a stable vacuum field for calibration of vacuum gauges by direct comparison with a reference gauge. According to ISO/TS 3536, it is required that the pressure indicated by the gauges shall be stable over time so that it dose not change more than 0.5% for time period of 2.5 min. In this study, three methods to generate a vacuum filed, namely, by using a variable leak valve, a mass flow controller and a combination in a capillary with a pressure controller, are evaluated from the viewpoint of both the stability and dynamic range of generated pressure.<br>   The vacuum field generated by a combination in a capillary with a pressure controller is the most stable of the three methods and satisfied the ISO/TS 3536 requirement over the range from 3.1×10^-4 to 4.8 Pa. This method is effective to generate a stable vacuum field for calibration of vacuum gauge.<br>

収録刊行物

• 真空

  真空 49 (3), 129-131, 2006

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679040278272
• NII論文ID: 10018133473
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.49.129
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 7930743
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7930743
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可