パルスレーザー堆積法による酸化亜鉛系透明導電膜の有機基板上への成膜 Transparent Conducting Zinc Oxide Films Prepared on Organic Substrates by Pulsed Laser Deposition Method

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著者

    • 前田 剛 MAEDA Tsuyoshi
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 安倉 秀明 AGURA Hideaki
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 鈴木 晶雄 [他] SUZUKI Akio
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 青木 孝憲 AOKI Takanori
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 松下 辰彦 MATSUSHITA Tatsuhiko
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

抄録

  Approximately 300-nm-thick 1.5 wt.% Al-doped zinc oxide(AZO: 1.5 wt.% Al<sub>2</sub>O<sub>3</sub>) films have been deposited on glass substrates and PVC substrates at room temperature by a pulsed laser deposition (PLD) using ArF excimer laser (λ=193 nm). The film deposition was carried out under the condition of laser energy density with 2 to 5 J/cm<sup>2</sup>. For AZO films deposited on PVC substrates with low laser energy density, electrical and optical properties were equivalent to that for AZO films deposited on glass substrates. However, for AZO films prepared by high laser energy density, the value of surface roughness was large and the value of Hall mobility remarkably decreased compared to that for AZO films grown on glass substrates.<br>

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN  

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 49(3), 150-152, 2006-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018133533
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    7931003
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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