雰囲気ガスの流れと加熱がスパッタ粒子の輸送に及ぼす影響 A Numerical Study of the Sputtered Particle Transport with the Ambient Gas Flow and Heating

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  The flux distribution of sputtered particles onto a circular substrate was numerically investigated, considering the ambient gas flow and the gas heating effect induced by sputtered particles. To explore the gas flow and the gas heating effects separetely, two calculation methods were employed, namely the <u>t</u>est <u>m</u>ulti-<u>p</u>article method (TMP) and the <u>d</u>irect <u>s</u>imulation <u>M</u>onte <u>C</u>arlo method (DSMC). The TMP with a frozen ambient gas flow was found to be suited for calculating the gas flow effect on a sputtered particle much heavier than Ar. For a lighter particle of which mass is comparable with or less than Ar, the DSMC becomes indispensable, because the rarefaction due to the gas heating increased the sputtered flux by 10% compared with that obtained by the TMP.<br>

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN  

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 49(3), 192-194, 2006-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018133641
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    7931231
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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