マイクロ波矩形プラズマを用いた高分子表面親水化の研究 Preparation of Hydrophilic Polymer Surfaces using Microwave Rectangular Plasma

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著者

    • 吉木 宏之 YOSHIKI Hiroyuki
    • 鶴岡工業高等専門学校電気工学科 Department of Electrical Engineering, Tsuruoka National College of Technology Inooka Sawada
    • 小松 雄一 KOMATSU Yuichi
    • 鶴岡工業高等専門学校電気工学科 Department of Electrical Engineering, Tsuruoka National College of Technology Inooka Sawada
    • 鈴木 文刀 SUZUKI Ayato
    • 鶴岡工業高等専門学校電気工学科 Department of Electrical Engineering, Tsuruoka National College of Technology Inooka Sawada

抄録

  A microwave rectangular plasma was generated over 450 mm long using a sectorial horn antenna with the aperture of 400×10 mm<sup>2</sup> and permanent magnets. High density plasma was efficiently produced due to the electron cyclotron resonance (ECR) heating. Ion saturation current density of 5-10 mA/cm<sup>2</sup> for Ar plasma was attained in the vicinity of the ECR zone which is close to the quartz window. The spatial plasma uniformity of ±7% was obtained over 300 mm long at 400 W, 1.0 Pa at the position of 160 mm away from the quartz window. This plasma source was applied to the surface modification of the high density poly(ethylene) (HDPE) and poly(tetrafluoroethylene) (PTFE) sheets. After Ar plasma irradiation at 400 W, 10 Pa and 150 s, the contact angles on the HDPE and PTFE surfaces decreased from 82° to 31° and from 90° to 49°, respectively. In addition, the uniformity on the plasma treatment was ±7% for HDPE and ±5% for PTFE over 420 mm long. X-ray photoelectron spectroscopy (XPS) analysis showed that defluorination and the formation of C=O groups appeared on the plasma treated surfaces.<br>

収録刊行物

  • 真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN  

    真空 = JOURNAL OF THE VACUUM SOCIETY OF JAPAN 49(3), 201-203, 2006-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018133662
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    7931259
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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