Measurement of Active Species Density for Synthesis of Amorphous Carbon Nitrides: II. Formation of CN($X^{2}\Sigma^{+}$) by Decomposition of BrCN

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The density of CN($X^{2}\Sigma^{+}$) radicals, which are considered to be the precursor to the formation of amorphous carbon nitride films, was measured by laser-induced fluorescence (LIF) spectroscopy of the CN($A^{2}\Pi_{i}$–$X^{2}\Sigma^{+}$), 4-0, 5-1, and 7-2 bands. The CN($X^{2}\Sigma^{+}$) radicals were produced by the dissociative excitation reaction of BrCN with microwave (MW) discharge flow of Ar under the pressure of 0.1 Torr, and the LIF spectra were observed just downstream of the nozzle tip from which BrCN was introduced. The LIF intensity for the individual transition was evaluated by spectral simulation analysis and by calibration against the Rayleigh scattering intensity by Ar atoms. The CN($X^{2}\Sigma^{+}$) density was evaluated to be $9.9\times 10^{17}$ m-3. This density was analyzed using the previously determined Ar+ density [H. Ito et al.: Jpn. J. Appl. Phys. 43 (2004) 7277], and it is suggested that the dominant production and loss processes of CN($X^{2}\Sigma^{+}$) are BrCN+-e- recombination and quenching with BrCN, respectively.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 45(6A), 5213-5218, 2006-06-15

    Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

参考文献:  37件中 1-37件 を表示

  • <no title>

    KULISCH W.

    Deposition of Diamond-Like Superhard Materials, 1999

    被引用文献1件

  • <no title>

    FUHR J. R.

    CRC Handbook of Chemistry and Physics, 1998

    被引用文献1件

  • <no title>

    FREIRE F. L. Jr.

    Jpn. J. Appl. Phys. 36, 4886, 1997

    被引用文献1件

  • <no title>

    SAITOH H.

    Jpn. J. Appl. Phys. 37, 4983, 1998

    被引用文献1件

  • <no title>

    DUEWER W. H.

    J. Chem. Phys. 56, 4355, 1972

    被引用文献1件

  • <no title>

    URISU T.

    J. Photochem. 2, 409, 1974

    被引用文献1件

  • <no title>

    ITO H.

    Jpn. J. Appl. Phys. 39, 1371, 2000

    被引用文献1件

  • <no title>

    SAITOH H.

    Jpn. J. Appl. Phys. 39, 1258, 2000

    被引用文献1件

  • <no title>

    TANAKA D.

    Jpn. J. Appl. Phys. 39, 4148, 2000

    被引用文献1件

  • <no title>

    OHKAWARA Y.

    Jpn. J. Appl. Phys. 40, 7013, 2001

    被引用文献1件

  • <no title>

    SAITOH H.

    Jpn. J. Appl. Phys. 41, 6169, 2002

    被引用文献1件

  • <no title>

    OHKAWARA Y.

    Jpn. J. Appl. Phys. 41, 7508, 2002

    被引用文献1件

  • <no title>

    ITO H.

    Jpn. J. Appl. Phys. 41, 3130, 2002

    被引用文献1件

  • <no title>

    ITO H.

    Jpn. J. Appl. Phys. 41, 5449, 2002

    被引用文献1件

  • <no title>

    ITO H.

    Jpn. J. Appl. Phys. 42, 7116, 2003

    被引用文献1件

  • <no title>

    ITO H.

    Jpn. J. Appl. Phys. 43, 7277, 2004

    被引用文献1件

  • <no title>

    DAVIS S. P.

    The Red System (A^2Π-X^2*) of the CN Molecule, 1963

    被引用文献1件

  • <no title>

    DESILVA A. W.

    Methods of Experimental Physics 9, Chap. 3, 1970

    被引用文献1件

  • <no title>

    KOVACS I.

    Rotational Structure in the Spectra of Diatomic Molecules, 1969

    被引用文献1件

  • <no title>

    KING G. W.

    J. Mol. Spectrosc. 21, 339, 1966

    被引用文献1件

  • <no title>

    MEAD R. D.

    Gas Phase Ion Chemistry, 1984

    被引用文献1件

  • <no title>

    AMIR O.

    J. Appl. Phys. 70(9), 4958, 1991

    被引用文献4件

  • <no title>

    FRANCESCHINI D. F.

    Appl. Phys. Lett. 60, 3229, 1992

    被引用文献1件

  • <no title>

    YENCHA A. J.

    Chem. Phys. 51, 343, 1980

    被引用文献1件

  • <no title>

    OZAKI Y.

    Chem. Phys. 80, 73, 1983

    被引用文献1件

  • <no title>

    OZAKI Y.

    Chem. Phys. 80, 85, 1983

    被引用文献1件

  • <no title>

    ITO H.

    Can. J. Phys. 62, 1586, 1984

    被引用文献1件

  • <no title>

    KANDA K.

    J. Phys. Chem. 93, 6020, 1989

    被引用文献1件

  • <no title>

    ITO H.

    J. Chem. Phys. 96, 4195, 1992

    被引用文献1件

  • Hydrogen Storage Phenomenon in Amorphous Phase of Hydrogenated Carbon Nitride

    Ohkawara Yoshiaki , Kusaka Ken-ichi , Ohshio Shigeo , Higa Akira , Toguchi Minoru , Saitoh Hidetoshi

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 42(8), 5251-5254, 2003-08-15

    応用物理学会 J-STAGE 参考文献17件 被引用文献1件

  • <no title>

    BAUSCHLICHER C. W. Jr.

    Astrophys. J. 332, 531, 1988

    DOI 被引用文献3件

  • <no title>

    HUANG Y.

    Appl. Opt. 32, 981, 1993

    被引用文献1件

  • <no title>

    GOUGOUSI T.

    Chem. Phys. Lett. 265, 399, 1997

    被引用文献1件

  • <no title>

    ALBRITTON D. L.

    At. Data Nucl. Data Tables 22, 1, 1978

    被引用文献3件

  • <no title>

    ZABARNICK S.

    Chem. Phys. 134, 185, 1989

    被引用文献1件

  • <no title>

    BRUNING F.

    J. Phys. Chem. 100, 19740, 1996

    被引用文献1件

各種コード

  • NII論文ID(NAID)
    10018149247
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    7941472
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  NDL  JSAP 
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