# Measurement of Active Species Density for Synthesis of Amorphous Carbon Nitrides: II. Formation of CN($X^{2}\Sigma^{+}$) by Decomposition of BrCN

## 抄録

The density of CN($X^{2}\Sigma^{+}$) radicals, which are considered to be the precursor to the formation of amorphous carbon nitride films, was measured by laser-induced fluorescence (LIF) spectroscopy of the CN($A^{2}\Pi_{i}$–$X^{2}\Sigma^{+}$), 4-0, 5-1, and 7-2 bands. The CN($X^{2}\Sigma^{+}$) radicals were produced by the dissociative excitation reaction of BrCN with microwave (MW) discharge flow of Ar under the pressure of 0.1 Torr, and the LIF spectra were observed just downstream of the nozzle tip from which BrCN was introduced. The LIF intensity for the individual transition was evaluated by spectral simulation analysis and by calibration against the Rayleigh scattering intensity by Ar atoms. The CN($X^{2}\Sigma^{+}$) density was evaluated to be $9.9\times 10^{17}$ m-3. This density was analyzed using the previously determined Ar+ density [H. Ito et al.: Jpn. J. Appl. Phys. 43 (2004) 7277], and it is suggested that the dominant production and loss processes of CN($X^{2}\Sigma^{+}$) are BrCN+-e- recombination and quenching with BrCN, respectively.

## 収録刊行物

• Japanese journal of applied physics. Pt. 1, Regular papers & short notes

Japanese journal of applied physics. Pt. 1, Regular papers & short notes 45(6A), 5213-5218, 2006-06-15

Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

## 各種コード

• NII論文ID(NAID)
10018149247
• NII書誌ID(NCID)
AA10457675
• 本文言語コード
EN
• 資料種別
ART
• 雑誌種別
大学紀要
• ISSN
0021-4922
• NDL 記事登録ID
7941472
• NDL 雑誌分類
ZM35(科学技術--物理学)
• NDL 請求記号
Z53-A375
• データ提供元
CJP書誌  NDL  JSAP

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