Production of Plasma by Capacity-Coupled Electrode and its Energy Control

Bibliographic Information

Other Title
  • 容量連結型電極を用いたプラズマ生成とそのエネルギー制御

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Details 詳細情報について

  • CRID
    1571980075312230528
  • NII Article ID
    10018157064
  • NII Book ID
    AA11404459
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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