Orthogonality Correction of Planar Sample Scanner for Atomic Force Microscope

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著者

    • Lee Dong-Yeon Lee Dong-Yeon
    • Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Guseong-Dong, Yuseong-Gu, Daejeon 305-701, Republic of Korea
    • Lee Moo-Yeon Lee Moo-Yeon
    • Digital Appliances Laboratory, LG Electronics Corp., 222-22 Guro3-Dong, Guro-Gu, Seoul 152-848, Republic of Korea
    • Gweon Dae-Gab Gweon Dae-Gab
    • Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Guseong-Dong, Yuseong-Gu, Daejeon 305-701, Republic of Korea

抄録

A planar scanner of an atomic force microscope (AFM) can move samples to within a few nm of resolution. Tube piezoelectric actuators have coupling errors, that can be eliminated by software correction; however, residual errors can deteriorate the actual information in a small-feature sample. To obtain stable AFM images of small-feature samples, a closed-loop control cannot be used due to the large random errors of the sensor. The orthogonality of a new sample scanner having a motion guide is measured and corrected using a simple electronic circuit in open-loop scanning to reduce the scanner artifact.

収録刊行物

  • Japanese journal of applied physics. Pt. 2, Letters  

    Japanese journal of applied physics. Pt. 2, Letters 45(13), L370-L372, 2006-04-25 

    Japan Society of Applied Physics

参考文献:  8件

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各種コード

  • NII論文ID(NAID)
    10018157749
  • NII書誌ID(NCID)
    AA10650595
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    0021-4922
  • NDL 記事登録ID
    7893688
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z54-J337
  • データ提供元
    CJP書誌  NDL  JSAP 
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