Orthogonality Correction of Planar Sample Scanner for Atomic Force Microscope

• Dong-Yeon Lee

• Moo-Yeon Lee

• Dae-Gab Gweon

収録刊行物

• Japanese journal of applied physics. Part 2, Letters & express letters

  Japanese journal of applied physics. Part 2, Letters & express letters 45 (12-16), L370-372, 2006-04

  Tokyo : Japan Society of Applied Physics

キーワード

• planar scanner
• coupling
• open loop

詳細情報

• CRID: 1520010380519568768
• NII論文ID: 10018157749
• NII書誌ID: AA11906093
• ISSN: 00214922
• NDL書誌ID: 7893688
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7893688
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • CiNii Articles