Polarity Determination of InN by Atomic Hydrogen Irradiation
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We have succeeded in determining the polarity of InN by atomic hydrogen (H*) irradiation for the first time. The surface of N- and In-polar InN films was exposed to H* at nominal temperatures between 200 and 500 °C for 30 to 90 min. After H* irradiation, indium (In) droplets appeared on the surface of N-polar InN, whereas they did not appear on In-polar InN. As the sample temperature was raised, the size of the In droplets on N-polar InN became bigger; furthermore the thickness of the remaining InN layers decreased. On the contrary, the thickness of In-polar InN layers remained unchanged. The mechanisms for these polarity-dependent surface behaviors are discussed. We propose H* irradiation as one of the promising methods for the polarity determination of InN.
- Jpn J Appl Phys
Jpn J Appl Phys 45(14), L384-L386, 2006-04-25
INSTITUTE OF PURE AND APPLIED PHYSICS