New Transparent Conducting Al-doped ZnO Film Preparation Techniques for Improving Resistivity Distribution in Magnetron Sputtering Deposition

• Tadatsugu Minami

• Toshihiro Miyata

• Yuusuke Ohtani

Bibliographic Information

Other Title

• New Transparent Conducting Al doped ZnO Film Preparation Techniques for Improving Resistivity Distribution in Magnetron Sputtering Deposition

Journal

• Japanese journal of applied physics. Part 2, Letters & express letters

  Japanese journal of applied physics. Part 2, Letters & express letters 45 (12-16), L409-412, 2006-04

  Tokyo : Japan Society of Applied Physics

Keywords

• zinc oxide
• AZO
• transparent conducting oxide
• thin film
• transparent electrode

Details

• CRID: 1522825129715717888
• NII Article ID: 10018157906
• NII Book ID: AA11906093
• ISSN: 00214922
• NDL BIB ID: 7893901
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I7893901
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • CiNii Articles