Metalorganic Chemical Vapor Deposition of Epitaxial Perovskite SrIrO3 Films on (100)SrTiO3 Substrates

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著者

    • Kim Yong Kwan Kim Yong Kwan
    • Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
    • Sumi Akihiro Sumi Akihiro
    • Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
    • Takahashi Kenji [他] Takahashi Kenji
    • Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
    • Yokoyama Shintaro
    • Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
    • Ito Shinichi
    • Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
    • Watanabe Takayuki
    • Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan
    • Akiyama Kensuke
    • Kanagawa Industrial Technology Research Institute, 705-1 Shimoimaizumi, Ebina, Kanagawa 243-0435, Japan
    • Kaneko Satoru
    • Kanagawa Industrial Technology Research Institute, 705-1 Shimoimaizumi, Ebina, Kanagawa 243-0435, Japan
    • Saito Keisuke
    • Application Laboratory, Bruker AXS, 3-9-A-6 Moriya-cho, Kanazawa-ku, Yokohama 221-0022, Japan
    • Funakubo Hiroshi
    • Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, J2-43, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan

抄録

(001)c-oriented 60–70-nm-thick SrIrO3 films with a high-pressure-stable perovskite phase were epitaxially grown on (100)SrTiO3 substrates by metalorganic chemical vapor deposition, and the crystal structure and the resistivity of the films were investigated. X-ray diffraction techniques including general $\theta$–$2\theta$ scan, the rocking curve and high-resolution reciprocal space mapping, were used to determine crystal quality, lattice constant, and crystal structure of the SrIrO3 films. It was demonstrated that the film crystal structure was tetragonal distorted by strong mechanical constraints due to the in-plane matching with the lattice parameters of SrTiO3 substrates, and maintained almost the same unit cell volume as the reported one for the perovskite cubic SrIrO3 phase. The resistivity of the film at room temperature was 740 μ$\Omega$ cm, and it decreased with decreasing temperature down to 100 K. Finally, an atomically flat surface was obtained on atomically stepped (100)SrTiO3 substrates.

収録刊行物

  • Japanese journal of applied physics. Pt. 2, Letters  

    Japanese journal of applied physics. Pt. 2, Letters 45(1), L36-L38, 2006-01-25 

    Japan Society of Applied Physics

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各種コード

  • NII論文ID(NAID)
    10018159487
  • NII書誌ID(NCID)
    AA10650595
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    0021-4922
  • NDL 記事登録ID
    7790340
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z54-J337
  • データ提供元
    CJP書誌  NDL  JSAP 
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