Thermal Desorption Development of Spin-On Glass for Electron Beam Nanolithography

• ARAKI Makoto

  Department of Applied Electronics, Tokyo University of Science

• TANIGUCHI Jun

  Department of Applied Electronics, Tokyo University of Science

• MIYAMOTO Iwao

  Department of Applied Electronics, Tokyo University of Science

Journal

• Japanese journal of applied physics. Pt. 2, Letters

  Japanese journal of applied physics. Pt. 2, Letters 45 (1), L68-L70, 2006-01-25

Keywords

• spin-on glass (SOG)
• thermal desorption development
• electron-beam lithography
• thermal desorption spectroscopy (TDS)

Details

• CRID: 1570291225451450880
• NII Article ID: 10018159650
• NII Book ID: AA10650595
• ISSN: 00214922
• Text Lang: en
• Data Source:
  • CiNii Articles