厚膜ta-C形成用X字状フィルタードアーク蒸着装置の開発 Development of X-Shape Filtered Arc Deposition Apparatus for Thick ta-C Film Coating

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Novel X-shape filtered arc deposition (X-FAD) apparatus is specially designed and newly developed for thick hydrogen-free tetrahedral amorphous-carbon (ta-C) film coating on superhard alloy (or cemented carbide) substrate. The apparatus has a graphite cathode for deposition of hydrogen-free diamond-like carbon (DLC; ta-C and amorphous carbon: a-C) film and a chromium (Cr) cathode for deposition of Cr layer. The filter duct shapes a composed form of a T-shape filter (T-FAD) for DLC film and a crank-shape filter (Crank FAD) for Cr film. Both carbon plasma beam and Cr plasma beam finally pass through a common plasma duct and scanner part, and go forward to the substrate.It is known that the adhesion of ta-C film to the superhard alloy is not good and the employment of binding interlayer between ta-C film and superhard alloy is one of the solutions. In this paper, using X-FAD, thick ta-C film was prepared on the superhard alloy. Principal results were as follows. (1) Crank FAD remarkably worked to prepare droplet-free Cr film. (2) Cr single layer did not work as appropriate biding interlayer between superhard alloy and ta-C. (3) Multi interlayer composed of Cr, a-C, and functionally graded DLC (a-C to ta-C), worked as a good biding interlayer for ta-C film on superhard alloy with thickness of more than 1 μm.

収録刊行物

  • 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society  

    電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 126(8), 757-762, 2006-08-01 

    一般社団法人 電気学会

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各種コード

  • NII論文ID(NAID)
    10018181396
  • NII書誌ID(NCID)
    AN10136312
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03854205
  • NDL 記事登録ID
    8053466
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-793
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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