Tb-Fe及びTb-Fe-Co系薄膜の磁気ひずみ特性 Magnetostrictive Properties of Tb-Fe and Tb-Fe-Co Films

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We studied Tb-Fe-Co giant magnetostrictive thin films and researched sputtering conditions to improve their magnetostrictive properties and investigated the possibility of their practical use. The sputtering Ar gas pressure influenced their inner stress and played a very important role for the determination of the magnetic easy axis. The largest magnetostriction was obtained when the Ar gas pressure was set at 0.7 Pa and the inner stress was controlled at an about 50 MPa tensile stress. In the Tb-Fe system, the Curie temperature is very low (about 140°C) compared with bulk materials, but the Curie temperature can be improved with increasing Co ratio. For films over 70% Co ratio, the Curie temperature was more than 250°C and the largest magnetostriction 1508 ppm was obtained at 80.1 % Co ratio. At almost all Tb-Fe-Co thin films, the values of magnetostriction were very high (over 1000 ppm), and the coercive forces were low (around 8 kA/m). Therefore, the Tb-Fe-Co giant magnetostrictive thin films are very appropriate materials for the applications in micro actuators and sensors.

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  • 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society  

    電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 126(8), 844-850, 2006-08-01 

    一般社団法人 電気学会

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各種コード

  • NII論文ID(NAID)
    10018181564
  • NII書誌ID(NCID)
    AN10136312
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03854205
  • NDL 記事登録ID
    8053760
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-793
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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