Reliability Evaluation of Micro Heater and its Application for Automotive Sensors

• Kojima Takio

  NGK Spark Plug Co., Ltd. R&D Center

• Tsujimura Yoshinori

  NGK Spark Plug Co., Ltd. R&D Center

• Mizuno Takuya

  NGK Spark Plug Co., Ltd. R&D Center

• Koyama Yuichi

  NGK Spark Plug Co., Ltd. R&D Center

• Kida Masahito

  NGK Spark Plug Co., Ltd. R&D Center

• Yamada Tessho

  NGK Spark Plug Co., Ltd. R&D Center

Bibliographic Information

Other Title

• マイクロヒータの信頼性評価と車載用センサへの応用
• マイクロヒータ ノ シンライセイ ヒョウカ ト シャサイヨウ センサ エ ノ オウヨウ

Abstract

A heat resistant micro heater consisting of a Pt thin film and a diaphragm was developed for automotive sensors and its reliability was evaluated from the mechanical and thermal points of view. The dominant failure modes for instant overheating and longtime heating were found to be de-lamination of the Pt film and electromigration of Pt, respectively. The life time was estimated to be over 10 years when the average heater temperature was 400°C (the peak temperature was over 600°C). As automotive sensors utilized this micro heater, the developed air flow meter and air quality sensor are described with features and evaluation methods unique to these sensors.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 126 (8), 397-402, 2006

  The Institute of Electrical Engineers of Japan

Keywords

• micro heater
• reliability
• electromigration
• air flow meter
• air quality sensor

Details

• CRID: 1390001204460129408
• NII Article ID: 10018182176
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.126.397
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 8056224
• Web Site: http://id.ndl.go.jp/bib/8056224
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8056224
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/126/8/126_8_397/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed