In-situ Measurement for Gas Concentrations using Tunable Lasers

• Sugiyama Tadashi

  Corporate R&D Headquarter, Yokogawa Electric Corporation

• Ueda Toshitsugu

  Waseda University, Graduate School of Information, Production and Systems

抄録

We have developed a high-sensitivity in-situ measurement technology that uses photons with an infrared wavelength band, as well as a systemization technology that demonstrates this measurement technology. More specifically, this measurement technology builds on a wavelength control technology and a wide-band photodetection technology whereby photons can be scanned over a broader wavelength range. With these technologies, gas concentrations can be measured with 1 ppb or higher sensitivity using absorption spectroscopy based on light-source wavelength based scanning in an infrared region.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 126 (8), 464-468, 2006

  一般社団法人 電気学会

キーワード

• in-situ measurements
• tunable lasers
• gas concentration measurements

詳細情報

• CRID: 1390282679436818432
• NII論文ID: 10018182296
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.126.464
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 8056537
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8056537
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/126/8/126_8_464/_pdf
• 本文言語コード: en
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